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July 2025
M9614A
Keysight/Agilent M9614A, Modular, Single Slot, 5 Channel, PXIe Source/Measure Unit
Actual item may vary if no part number is provided on quote request.
✔ 2 Year Warranty Included
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Andrew Gar**** Verified Buyer
" Amazing to work with and had my order within 1 week after purchasing with all NI certs and data that were needed. "
March 2025
Said Sai**** Verified Buyer
" Competent contact for highly specialized components. The support team is very knowledgeable. Many thanks for the help and the fast shipping! "
January 2025
Bob C**** Verified Buyer
" Jason was able to get our emergency situation taken care of quickly and professionally. "
May 2025
Gregg Flecki**** Verified Buyer
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January 2025
Carol Zimme**** Verified Buyer
" Very responsive and helpful, competitive pricing. Good source! "
July 2025
Andrew Gar**** Verified Buyer
" Amazing to work with and had my order within 1 week after purchasing with all NI certs and data that were needed. "
March 2025
Said Sai**** Verified Buyer
" Competent contact for highly specialized components. The support team is very knowledgeable. Many thanks for the help and the fast shipping! "
January 2025
Bob C**** Verified Buyer
" Jason was able to get our emergency situation taken care of quickly and professionally. "
May 2025
Gregg Flecki**** Verified Buyer
" Great service and great products. This is my 2nd time using Apex Waves, truly impressed. "
January 2025
Keysight/Agilent M9614A PXIe Source/Measure Unit
The Keysight M9614A is a modular unit of five integrated source / measure units within a single PXI Express slot. It delivers an output voltage and/or current of up to ± 30 V and/or ± 500 mA with a measurement resolution of 6 µV and 100 pA. Of the five available channels, there are two that allow operation of the extended current capabilities of up to +750 mA in the 6 V range but with a limit on each channel of ± 30 V and/or ± 150 mA. With its ability to produce such a large number of outputs along with a high level of detail during measurements, the M9614A is well suited for use in highly detailed semiconductor parametric testing.
Designed for use in high-channel-count applications, the M9614A solves the problems of space and cost associated with using benchtop SMUs or traditional four-channel PXIe modules. By offering five channels in a single slot, the M9614A reduces both its physical size and cost per channel. This enables users to perform parallel testing of several devices and evaluate multi-rail ICs utilizing dozens of precision supplies. This is crucial in the area of semiconductor reliability testing, which requires simultaneously stressing hundreds of devices.
The M9614A removes the user from having to manually change current measuring ranges by automatically changing them based upon the selection made by the user of either of two grouping options, allowing the user to capture leakage currents down into the 100 pA range up to active-state currents of hundreds of milliamps without interruption. Additionally, each channel supports pulsed I/V capability with a minimum pulse width of 100 μs and sampling rate of 500 kSa/s, enabling the capture of fast transients while minimizing damage caused to the DUT due to excessive self-heating.
When performing noise-sensitive analog, RF, or quantum computing type testing, users may want to consider pairing the M9614A with the PX0107A low-noise filter adapter. When used together, this combination lowers the noise present on the voltage source output down to 25 uVrms (10 Hz to 20 MHz), while still allowing for an output voltage and/or current level of up to 30 V and/or 150 mA. Therefore, the M9614A has become a widely accepted platform upon which various types of semiconductor reliability testing, multi-channel parametric analysis, and power-aware validation of modern mixed-signal IC designs can be performed.
| Model | M9614A |
|---|---|
| Part Type | PXIe 5? Channel Precision SMU |
| Total Channels | 5 galvanically isolated channels per module |
| Form Factor | 1 slot PXI Express |
| Max Voltage (all channels) | ±30 V |
| Max Current (Ch 1–2, 6 V range) | Source +750 mA, sink –500 mA |
| Max Current (Ch 3–5, all ranges) | ±500 mA |
| Voltage/Current Resolution | 6 µV / 10 pA (100 pA min measurable) |
| Sampling Rate | 500 kSa/s per channel |
| Minimum Pulse Width | 100 µs |
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