M9601A

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Keysight/Agilent M9601A, 1 Output, 2 Slots, Modular, PXIe Source Measurement Unit

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Keysight/Agilent M9601A PXIe Precision Source Measure Unit

The M9601A PXIe Source Measurement Unit (SMU) is an all-in-one solution that offers both voltage and current source functionality along with simultaneous measurement. As a result, the unit can be used as a symmetrical four-quadrant source, load, meter, and pulse generator. The unit provides an extremely versatile range of operation, i.e., from 10 fA to 315 mA and from 500 nV to 210 V. Therefore, this integrated solution allows for simplified complex IV characterization of semiconductors, passive components, and electronic devices, which typically would require manual connection changes or the use of additional instrumentation.

Ultra-low current noise of only 30 fA rms at 1 PLC gives the M9601A approximately three times better performance than typical PXIe SMUs under identical aperture conditions. In addition, the M9601A achieves the same level of noise performance ten times faster than typical PXIe SMUs, thus improving overall system throughput without degrading data quality. Fast pulsed measurements, as short as 20 microseconds in width and a 1.25 megasamples per second (MSa/s) sampling rate, are available to characterize rapid dynamic behavior and eliminate self-heating effects inherent in many devices during transient and pulsed IV sweeps, thereby revealing real material properties.

The fast transient mode of the M9601A has been designed to provide a slew rate of 1.4 volts/microsecond independent of load. Consequently, the unit captures a device's actual switching characteristics rather than being limited by the instrument's ramp speed. The programmable output impedance of the unit also includes negative values. These allow for compensation of cable and contact resistances, often eliminating the requirement for four-wire Kelvin connections, and enable emulation of series or parallel resistances to simulate a variety of loading conditions with great flexibility while also canceling out unwanted external resistive loads in the sourcing path.

Automated test systems utilizing multiple M9601A units will excel in semiconductor parametric and reliability testing, wafer-level characterization, and very low-current materials science-type applications. Integration into a PXIe chassis will enable the creation of large-scale, high-throughput systems for both research and manufacturing laboratories requiring ultra-high sensitivity to detect sub-femtoampere levels of current, wide voltage compliance, fast pulsing capability, precision DC sourcing, and high-speed pulse profiling capabilities to generate accurate device models and perform thorough failure analyses on the devices under test with complete integrity.

M9601A Technical Specifications
ModelM9601A
Part TypePXIe Precision SMU
Source & Measure Topology4-quadrant V/I source/sink
Voltage Ranges±21 V / ±105 V / ±210 V, 500 nV resolution
Current Ranges±315 mA max, decade ranges to 10 fA
Current Noise Floor30 fArms @ 1 PLC, 10 fA resolution
Pulse & Sample Rate20 µs min. pulse, 1.25 MSa/s digitizing
Slew RateUp to 1.4 V/µs (PS mode)
Max. Source Power11 W, ±210 V / ±50 mA, ±21 V / ±315 mA
Settling Time≤45 µs to 0.1% (≤40 V ranges, open load)

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N9601A, H9601A, M960QA, M960WA, M9601Z

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