M9603A

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Keysight/Agilent M9603A, 1 Slot, 1 Output, Modular, PXI Vector Component Analyzer

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Keysight Agilent HP - Source Measure Units - M9603A
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Keysight/Agilent M9603A PXIe Precision Source/Measure Unit

The Keysight M9603A is a one-channel precision Source/Measure Unit (SMU) in the PXIe format, which includes both voltage and current forcing along with the ability to measure simultaneously. The maximum output level on this unit is 60 volts at 3.5 amps DC and 10.5 amps pulsed while measuring down to 6 microvolts and 100 fA. As such, this module can be used to perform static DC characterization or dynamic pulsed I-V sweeps so it can fit into many different types of device test applications.

In terms of its capabilities regarding high-speed dynamic testing, the M9603A can produce pulses as short as 10 µs while simultaneously sampling at a rate of 15 MSa/s the waveforms of both current and voltage. This level of microsecond-level agility is necessary when testing components such as VCSELs, laser diodes, and high-brightness LEDs because the amount of time that it takes to heat these components represents a significant portion of their response time to changes in current or voltage. Therefore, for example, L-I-V measurements are greatly affected if there are large amounts of heat generated during testing. Also, the fast transient capability of the M9603A allows for the measurement of the rapidly changing characteristics of integrated circuits and power semiconductors, which capture rapid switching events without the distortion that occurs from self-heating. Therefore, engineers may measure dynamic impedance, gate charge, and turn-on delay times of devices including GaN and SiC FETs and next-generation power semiconductors. This will allow engineers to verify the performance of devices over realistic operating conditions.

To maintain low-current measurement confidence, the M9603A has an extremely low noise floor of 400 fArms at 1 PLC (power line cycle), thereby allowing shorter integration times for higher throughput production testing. The seamless current measurement ranging function eliminates the settling time required when changing ranges of measurement. Therefore, uninterrupted data can be captured over multiple decades of current levels using a single-range setting. The Keysight M9603A is housed in a single PXIe slot and can be easily integrated into scalable automated test systems for both parametric analysis of semiconductors and optoelectronic device characterization and advanced material research.

M9603A Technical Specifications
ModelM9603A
Part TypePXIe Precision Source/Measure Unit
Output Channels1 channel with triaxial connector
Narrowest Pulse Duration10 µs
Maximum Digitizing Rate15 MSa/s
Voltage Forcing Range±60 V
Maximum DC Current±3.5 A
Maximum Pulse Current±10.5 A
Voltage Measurement Resolution6 µV
Current Measurement Resolution100 fA

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J9603A, MP603A, M9Y03A, M9603Q, M9603W

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