4200A-SCS

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Keithley 4200A-SCS, All-in-One Instrument, 10 ATRS, Parameter Analyzer

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Keithley - Keithley Source Measure Units - 4200A-SCS
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Keithley 4200A-SCS Parameter Analyzer

The 4200A-SCS by Keithley is an all-in-one instrument with customizable modules that can provide all of the necessary information needed for a complete evaluation of semiconductor materials, processes and devices. The system has three main functions: current/voltage (I-V), capacitance voltage (C-V) and ultra-fast pulsed I-V measurements. All of these measurements can be performed simultaneously on a single device or process, thus providing a significant increase in R&D cycle times. In addition, the SMU’s have extremely high precision, allowing resolutions as low as 10 ATRS (atto amperes) when using an optional preamplifier. This allows the measurement of very low leakage currents in advanced nano scale devices and sensitive materials.

Its ability to be versatile is further enhanced through the addition of a variety of modular instruments such as multi-frequency Capacitance/Voltage Units (CVU's) for impedance analysis and Ultra-fast Pulse Measure Units (PMU's) for analyzing transient phenomena and self-heating. The Clarius software included in the 4200A-SCS will automate the entire characterization process using its user-friendly touch screen interface. Clarius includes over 450 readily available application tests for various technologies, including but not limited to CMOS transistor technology, memory device technology, photovoltaic technology, MEMS technology and many others. These application tests will greatly reduce the amount of time needed to develop new test procedures. Additionally, Clarius will include embedded video tutorials and real-time parameter extraction for immediate access to data interpretation.

In order to make complex test setups easier to manage, the 4200A-SCS has automated switching solutions (the CVIV Multi-Switch and RPM module) that enable automatic transition between I-V/C-V/pulsed I-V measurements without requiring any manual cabling changes. This helps eliminate one of the biggest sources of errors associated with manual cabling changes, and increases the overall quality of the measurements. The 4200A-SCS was designed for future requirements and is completely upgradeable using field installable instruments. The analyzer is suitable for many different applications such as reliability testing (NBTI/PBTI), resistivity/Hall Effect measurements, and the development of power devices/bio-sensors/compound semiconductors.

4200A-SCS Technical Specifications
Model4200A-SCS
Part TypeParameter Analyzer
Measurement ModesI-V, C-V, and pulsed I-V
SMU Voltage Range±210 V max
SMU Current RangeUp to ±1.05 A
Current SensitivityDown to 10 aA with preamp
C-V Frequency Range1 kHz to 10 MHz
C-V DC Bias±30 V (up to ±210 V via SMUs)
Pulse Sampling Rate200 MS/s, 5 ns
Pulse Output Range±40 V, ±800 mA

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4200A-QCS, 4200A-ZCS, 4200A-SDS, 4200A-SCQ, 4200A-SCZ

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